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IGI manufactured standard and custom reticles, as well as other high-precision optical patterns, for semiconductors, MEMS, MOEMS, medical, scientific, military, and industrial use. These were made from production ready data, or by engineering specialists who designed reticles from customer concepts.

Our most commonly produced reticles were UT1X, Reduction, and 1X Stepper & Scanner reticles.

 

UT1X Reticles – Ultratech

UT1X reticles were most commonly imaged on Quartz with pellicles to the specifications shown in the tables.

UT1X
Dimensions Substrates Coatings
3” x 5” x 0.090” Quartz Chrome
5” x 5” x 0.090” Quartz Chrome
6” x 6” x 0.250” Quartz Chrome

Here are some common specifications for UT1X reticles.

Common Specifications for Quartz with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
4.0µ ≤0.25µ ≤0.25µ ≤0.25µ 1.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ

 

 

Reduction Reticles – ASML, Azores, Canon, GCA, Nikon

Reduction Reticles could be fully customized to customer specification. They were most commonly imaged on Quartz with or without pellicles in these common reticle sizes.

Reduction Reticles
  Dimensions Substrates Coatings
2X, 2.5X, 4X 7.25” x 7.25” x.150” Quartz Chrome
5X, 10X 5” x 5” x 0.090” Quartz Chrome
4X, 5X 6” x 6” x 0.250” Quartz Chrome

Here are some common specifications for production reticles.

Common Specifications for Quartz with Chrome
 CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
4.0µ ≤0.25µ ≤0.25µ ≤0.25µ 1.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ

 

 

1X Stepper and Scanner Reticles – Tamarack / SUSS

Stepper and Scanner reticles were provided in a variety of standard or custom sizes. They were most commonly imaged on Quartz and Soda Lime, to the specifications shown in the following tables.

1X Stepper and Scanner Reticles
Dimensions Substrates Coatings
5” x 5” x 0.090” Quartz, Soda Lime Chrome, Aluminum
6” x 6” x 0.120" or 0.250” Quartz, Soda Lime Chrome, Aluminum
7” x 7” x 0.120” Quartz, Soda Lime Chrome, Aluminum
9” x 9” x 0.120” or 0.250” Quartz, Soda Lime Chrome
14” x 14” x 0.120” or 0.190” Quartz, Soda Lime Chrome
Common Specifications for Quartz with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Up to 9” x 9”
5.0µ ≤0.50µ 0.50µ 0.35µ 5.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ
Larger than 9” x 9”
5.0µ ≤0.50µ ≤0.50µ ≤1.5µ 5.0µ
3.0µ ≤0.20µ ≤0.20µ ≤1.0µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤1.0µ 0.90µ
Common Specifications for Soda Lime with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Up to 9” x 9”
10µ ≤1.0µ ≤1.0µ ≤2.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤1.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤0.75µ 2.0µ
1.0µ ≤0.15µ ≤0.15µ ≤0.75µ 2.0µ
Larger than 9” x 9”
10µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤1.50µ 2.0µ
1.0 µ ≤0.15µ ≤0.15µ ≤1.0µ 2.0µ

 

Infinite Graphics Incorporated now concentrates on providing CAD/CAM software to electronics industries such as PCB manufacturing, Solder paste stencil design, semiconductor manufacturing, electrical test and Raster Image Processing (RIP), and other areas requiring precision graphics software. IGI markets its diverse line of software products to electronics industries and markets worldwide. Contact us.