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IGI provides medium area masks (MAMs) in standard sizes of 9″ to 24″, as well as any custom size you require. We can use standard substrates of quartz and soda lime, custom substrates, or even substrates you supply. Standard coatings include chrome, aluminum, and iron oxide.

We use automated optical inspection (AOI) together with your data and specifications to provide the highest quality with quick turnaround. Die-to-database AOI assures quality for MAMs, regardless of the dimensions. Automated inspections to design rule and die-to-die are also available.

Custom sizes, substrates and coatings are available. Tighter tolerances and defect specifications are also available for specials. Here are our most common substrate/coating combinations.

Medium Area Mask Dimensions, Substrates and Coatings
 Dimensions Substrates Coatings
9” x 9” x 0.120” Quartz, Soda Lime Chrome, Aluminum, Iron Oxide
14” x 14” x 0.120” or 0.190” Quartz, Soda Lime Chrome, Aluminum, Iron Oxide
450mm x 450mm x 4.8mm Quartz, Soda Lime Chrome, Aluminum, Iron Oxide

 

Medium Area masks can be ordered in a variety of standard or custom sizes. They are most commonly imaged on Quartz and Soda Lime, to the specifications shown.

Common Specifications for Quartz with Chrome
 CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Plate Sizes:     9" x 9"        14" x 14"         450mm x 450mm
10.0µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤1.5µ 1.5µ
1.0µ ≤0.15µ ≤0.15µ ≤1.0µ 1.0µ
Common Specifications for Soda Lime with Chrome
 CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Plate Size:   9" x 9"  
10.0µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤1.5µ 2.0µ
1.0µ ≤0.15µ ≤0.15µ ≤1.0µ 2.0µ
Plate Size:   14" x 14" 
10.0µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤1.5µ 2.0µ
1.0µ ≤0.15µ ≤0.15µ ≤1.5µ 2.0µ
Plate Size:   450mm x 450mm
10.0µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤2.0µ 2.0µ
1.0µ ≤0.15µ ≤0.15µ ≤2.0µ 2.0µ

We have the experienced engineering staff and CAD resources to make your innovative idea a reality. Contact us.