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IGI manufactures standard and custom reticles, as well as other high-precision optical patterns, for semiconductors, MEMS, MOEMS, medical, scientific, military, and industrial use. We can work from your production ready data, or our engineering specialists can design and layout a reticle from your concept or print.

Our most commonly produced reticles include UT1X, Reduction, and 1X Stepper & Scanner reticles.

 

UT1X Reticles – Ultratech

UT1X reticles are most commonly imaged on Quartz with pellicles to the specifications shown in the tables.

UT1X
Dimensions Substrates Coatings
3” x 5” x 0.090” Quartz Chrome
5” x 5” x 0.090” Quartz Chrome
6” x 6” x 0.250” Quartz Chrome

Here are some common specifications for UT1X reticles.

Common Specifications for Quartz with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
4.0µ ≤0.25µ ≤0.25µ ≤0.25µ 1.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ

 

 

Reduction Reticles – ASML, Azores, Canon, GCA, Nikon

Reduction Reticles may be fully customized to your specification. They are most commonly imaged on Quartz with or without pellicles. Below are some common reticles sizes.

Reduction Reticles
  Dimensions Substrates Coatings
2X, 2.5X, 4X 7.25” x 7.25” x.150” Quartz Chrome
5X, 10X 5” x 5” x 0.090” Quartz Chrome
4X, 5X 6” x 6” x 0.250” Quartz Chrome

Here are some common specifications for production reticles.

Common Specifications for Quartz with Chrome
 CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
4.0µ ≤0.25µ ≤0.25µ ≤0.25µ 1.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ

 

 

1X Stepper and Scanner Reticles – Tamarack / SUSS

Stepper and Scanner reticles can be ordered in a variety of standard or custom sizes. They are most commonly imaged on Quartz and Soda Lime, to the specifications shown in the following tables.

1X Stepper and Scanner Reticles
Dimensions Substrates Coatings
5” x 5” x 0.090” Quartz, Soda Lime Chrome, Aluminum
6” x 6” x 0.120" or 0.250” Quartz, Soda Lime Chrome, Aluminum
7” x 7” x 0.120” Quartz, Soda Lime Chrome, Aluminum
9” x 9” x 0.120” or 0.250” Quartz, Soda Lime Chrome
14” x 14” x 0.120” or 0.190” Quartz, Soda Lime Chrome
Common Specifications for Quartz with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Up to 9” x 9”
5.0µ ≤0.50µ 0.50µ 0.35µ 5.0µ
3.0µ ≤0.20µ ≤0.20µ ≤0.25µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤0.25µ 0.90µ
Larger than 9” x 9”
5.0µ ≤0.50µ ≤0.50µ ≤1.5µ 5.0µ
3.0µ ≤0.20µ ≤0.20µ ≤1.0µ 1.0µ
1.5µ ≤0.15µ ≤0.15µ ≤1.0µ 0.90µ
Common Specifications for Soda Lime with Chrome
CD Size CD Mean to Nominal CD Uniformity Registration Maximum Defect Size
Up to 9” x 9”
10µ ≤1.0µ ≤1.0µ ≤2.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤1.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤0.75µ 2.0µ
1.0µ ≤0.15µ ≤0.15µ ≤0.75µ 2.0µ
Larger than 9” x 9”
10µ ≤1.0µ ≤1.0µ ≤3.0µ 5.0µ
4.0µ ≤0.50µ ≤0.50µ ≤2.0µ 3.0µ
2.5µ ≤0.25µ ≤0.25µ ≤1.50µ 2.0µ
1.0 µ ≤0.15µ ≤0.15µ ≤1.0µ 2.0µ

IGI stocks a range of commonly used pellicles and can also stock specific pellicles upon request.

In addition to standard reticles, Infinite Graphics has the engineering and production resources to produce your custom photomasks. Contact our team.