IGI manufactured standard and custom reticles, as well as other high-precision optical patterns, for semiconductors, MEMS, MOEMS, medical, scientific, military, and industrial use. These were made from production ready data, or by engineering specialists who designed reticles from customer concepts.
Our most commonly produced reticles were UT1X, Reduction, and 1X Stepper & Scanner reticles.
UT1X Reticles – Ultratech
UT1X reticles were most commonly imaged on Quartz with pellicles to the specifications shown in the tables.
Dimensions | Substrates | Coatings |
3” x 5” x 0.090” | Quartz | Chrome |
5” x 5” x 0.090” | Quartz | Chrome |
6” x 6” x 0.250” | Quartz | Chrome |
Here are some common specifications for UT1X reticles.
CD Size | CD Mean to Nominal | CD Uniformity | Registration | Maximum Defect Size |
4.0µ | ≤0.25µ | ≤0.25µ | ≤0.25µ | 1.0µ |
3.0µ | ≤0.20µ | ≤0.20µ | ≤0.25µ | 1.0µ |
1.5µ | ≤0.15µ | ≤0.15µ | ≤0.25µ | 0.90µ |
Reduction Reticles – ASML, Azores, Canon, GCA, Nikon
Reduction Reticles could be fully customized to customer specification. They were most commonly imaged on Quartz with or without pellicles in these common reticle sizes.
Dimensions | Substrates | Coatings | |
2X, 2.5X, 4X | 7.25” x 7.25” x.150” | Quartz | Chrome |
5X, 10X | 5” x 5” x 0.090” | Quartz | Chrome |
4X, 5X | 6” x 6” x 0.250” | Quartz | Chrome |
Here are some common specifications for production reticles.
CD Size | CD Mean to Nominal | CD Uniformity | Registration | Maximum Defect Size |
4.0µ | ≤0.25µ | ≤0.25µ | ≤0.25µ | 1.0µ |
3.0µ | ≤0.20µ | ≤0.20µ | ≤0.25µ | 1.0µ |
1.5µ | ≤0.15µ | ≤0.15µ | ≤0.25µ | 0.90µ |
1X Stepper and Scanner Reticles – Tamarack / SUSS
Stepper and Scanner reticles were provided in a variety of standard or custom sizes. They were most commonly imaged on Quartz and Soda Lime, to the specifications shown in the following tables.
Dimensions | Substrates | Coatings |
5” x 5” x 0.090” | Quartz, Soda Lime | Chrome, Aluminum |
6” x 6” x 0.120" or 0.250” | Quartz, Soda Lime | Chrome, Aluminum |
7” x 7” x 0.120” | Quartz, Soda Lime | Chrome, Aluminum |
9” x 9” x 0.120” or 0.250” | Quartz, Soda Lime | Chrome |
14” x 14” x 0.120” or 0.190” | Quartz, Soda Lime | Chrome |
CD Size | CD Mean to Nominal | CD Uniformity | Registration | Maximum Defect Size |
Up to 9” x 9” | ||||
5.0µ | ≤0.50µ | ≤ 0.50µ |
≤ 0.35µ |
5.0µ |
3.0µ | ≤0.20µ | ≤0.20µ | ≤0.25µ | 1.0µ |
1.5µ | ≤0.15µ | ≤0.15µ | ≤0.25µ | 0.90µ |
Larger than 9” x 9” | ||||
5.0µ | ≤0.50µ | ≤0.50µ | ≤1.5µ | 5.0µ |
3.0µ | ≤0.20µ | ≤0.20µ | ≤1.0µ | 1.0µ |
1.5µ | ≤0.15µ | ≤0.15µ | ≤1.0µ | 0.90µ |
CD Size | CD Mean to Nominal | CD Uniformity | Registration | Maximum Defect Size |
Up to 9” x 9” | ||||
10µ | ≤1.0µ | ≤1.0µ | ≤2.0µ | 5.0µ |
4.0µ | ≤0.50µ | ≤0.50µ | ≤1.0µ | 3.0µ |
2.5µ | ≤0.25µ | ≤0.25µ | ≤0.75µ | 2.0µ |
1.0µ | ≤0.15µ | ≤0.15µ | ≤0.75µ | 2.0µ |
Larger than 9” x 9” | ||||
10µ | ≤1.0µ | ≤1.0µ | ≤3.0µ | 5.0µ |
4.0µ | ≤0.50µ | ≤0.50µ | ≤2.0µ | 3.0µ |
2.5µ | ≤0.25µ | ≤0.25µ | ≤1.50µ | 2.0µ |
1.0 µ | ≤0.15µ | ≤0.15µ | ≤1.0µ | 2.0µ |
Infinite Graphics Incorporated now concentrates on providing CAD/CAM software to electronics industries such as PCB manufacturing, Solder paste stencil design, semiconductor manufacturing, electrical test and Raster Image Processing (RIP), and other areas requiring precision graphics software. IGI markets its diverse line of software products to electronics industries and markets worldwide. Contact us.